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SCOPE
The mission of the Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) is to increase the level of understanding on ultra-clean processing and surface preparation technology in all steps of the fabrication of semiconductor-based devices. This symposium is a world class forum in the field of wafer cleaning, clean processing and related metrology of contamination and defects. The Symposium program consists of invited presentations, as well as selected contributing presentations and posters.