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 Deadline to submit your proceedings manuscript: 8th May.

Manuscript/proceedings feedback from the peer-review: All authors will receive review feedback on 25th of May (check your spam/quaranteened email folders!). 

Programme will be announced by Thursday 15th June 2023. 


The 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) is a biannual event. The next edition will be held from 12 - 14 September 2023 at Oud Sint-Jan in Brugge, Belgium. The UCPSS proudly celebrates its 30th anniversary (to be more precise 30 years+1-covid-year) since its first edition in September 1992 in Leuven.

It is the purpose of the UCPSS symposium to increase the level of understanding on ultra-clean processing and surface preparation technology in all steps of the fabrication of ICs, bioelectronics devices and PV-modules. The conference consists of invited presentations, as well as selected contributing presentations and posters.

This symposium is a world class forum in the area of wafer cleaning, clean processing and related contamination and defect metrology and therefore presents an excellent opportunity to obtain an update on the state-of-the-art of the subject matter.


Register now


Key figures on the UCPSS Symposium

+ 200 participants from Asia, Europe and the Americas

Mix of industry and academic professionals

+/- 60 presentations

1 day tutorials and 3 days of symposium

1 poster session

1 Symposium dinner

Industry exhibition

Check the preliminary agenda of tutorials and symposium

11 September
12 September
13 September
14 September 
   Sponsor booths
   Opening + Session     Symp. Session    Symp. Session  
     Coffee break      Coffee break     Coffee break   
     Symp. Session    Symp. Session    Symp. Session  
   Welcome desk open     Lunch (walking)      Lunch (walking)      Lunch (walking)   
   Tutorials      Poster session     Symp. Session    Symp. Session  
     Coffee break    Coffee break    Coffee break  
     Poster session    Symp. Session
Gold sponsors plenary 
        Conference dinner   Sponsor booths dismantling  

The above schedule is subject to changes.

     Brugges image Bruno Gouwy visit Brugges Bruges image Bruno Gouwy Visit Bruges

*Those pictures taken by Bruno Gouwy, "Visit Bruges"


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