Deadline to submit your proceedings manuscript: 8th May.
Manuscript/proceedings feedback from the peer-review: All authors will receive review feedback on 25th of May (check your spam/quaranteened email folders!).
Programme will be announced by Thursday 15th June 2023.
The 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) is a biannual event. The next edition will be held from 12 - 14 September 2023 at Oud Sint-Jan in Brugge, Belgium. The UCPSS proudly celebrates its 30th anniversary (to be more precise 30 years+1-covid-year) since its first edition in September 1992 in Leuven.
It is the purpose of the UCPSS symposium to increase the level of understanding on ultra-clean processing and surface preparation technology in all steps of the fabrication of ICs, bioelectronics devices and PV-modules. The conference consists of invited presentations, as well as selected contributing presentations and posters.
This symposium is a world class forum in the area of wafer cleaning, clean processing and related contamination and defect metrology and therefore presents an excellent opportunity to obtain an update on the state-of-the-art of the subject matter.
Key figures on the UCPSS Symposium
+ 200 participants from Asia, Europe and the Americas
Mix of industry and academic professionals
+/- 60 presentations
1 day tutorials and 3 days of symposium
1 poster session
1 Symposium dinner
Industry exhibition
Check the preliminary agenda of tutorials and symposium
Monday 11 September |
Tuesday 12 September |
Wednesday 13 September |
Thursday 14 September |
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Sponsor booths set-up |
Opening + Session | Symp. Session | Symp. Session | |||||
Coffee break | Coffee break | Coffee break | ||||||
Symp. Session | Symp. Session | Symp. Session | ||||||
Welcome desk open | Lunch (walking) | Lunch (walking) | Lunch (walking) | |||||
Tutorials | Poster session | Symp. Session | Symp. Session | |||||
Coffee break | Coffee break | Coffee break | ||||||
Poster session | Symp. Session Gold sponsors plenary |
Closing | ||||||
Conference dinner | Sponsor booths dismantling | |||||||
The above schedule is subject to changes.
*Those pictures taken by Bruno Gouwy, "Visit Bruges"