| Date | Symp No. | Venue | Proceedings title | Proceedings volume | Proceedings link |
| 1992 | I | Leuven | |||
| 1994 | II | Brugge | Ultra Clean Processing of Silicon Surfaces II | ACCO ISBN 90-334-3262-5 | |
| 1996 | III | Antwerpen | Ultra Clean Processing of Silicon Surfaces III | ACCO ISBN 90-334-3758-9 | |
| 1998 | IV | Oostende | Ultra Clean Processing of Silicon Surfaces IV | Solid State Phenomena Vol. 65-66 | Ultra Clean Processing of Silicon Surfaces IV | Book | Scientific.Net |
| 2000 | V | Oostende | Ultra Clean Processing of Silicon Surfaces V | Solid State Phenomena Vol. 76-77 | Ultra Clean Processing of Silicon Surfaces V | Book | Scientific.Net |
| 2002 | VI | Oostende | Ultra Clean Processing of Silicon Surfaces VI | Solid State Phenomena Vol. 92 | Ultra Clean Processing of Silicon Surfaces VI | Book | Scientific.Net |
| 2004 | VII | Brussel | Ultra Clean Processing of Silicon Surfaces VII | Solid State Phenomena Vol. 103-104 | Ultra Clean Processing of Silicon Surfaces VII | Book | Scientific.Net |
| 2006 | VIII | Antwerpen | Ultra Clean Processing of Semiconductor Surfaces VIII | Solid State Phenomena Vol. 134 | Ultra Clean Processing of Semiconductor Surfaces VIII | Book | Scientific.Net |
| 2008 | IX | Brugge | Ultra Clean Processing of Semiconductor Surfaces IX | Solid State Phenomena Vol. 145-146 | Ultra Clean Processing of Semiconductor Surfaces IX | Book | Scientific.Net |
| 2010 | X | Oostende | Ultra Clean Processing of Semiconductor Surfaces X | Solid State Phenomena Vol. 187 | Ultra Clean Processing of Semiconductor Surfaces X | Book | Scientific.Net |
| 2012 | XI | Gent | Ultra Clean Processing of Semiconductor Surfaces XI | Solid State Phenomena Vol. 195 | Ultra Clean Processing of Semiconductor Surfaces XI | Book | Scientific.Net |
| 2014 | XII | Brussel | Ultra Clean Processing of Semiconductor Surfaces XII | Solid State Phenomena Vol. 219 | Ultra Clean Processing of Semiconductor Surfaces XII | Book | Scientific.Net |
| 2016 | XIII | Knokke | Ultra Clean Processing of Semiconductor Surfaces XIII | Solid State Phenomena Vol. 255 | Ultra Clean Processing of Semiconductor Surfaces XIII | Book | Scientific.Net |
| 2018 | XIV | Leuven | Ultra Clean Processing of Semiconductor Surfaces XIV | Solid State Phenomena Vol. 282 | Ultra Clean Processing of Semiconductor Surfaces XIV | Book | Scientific.Net |
| 2021 | VII | Online edition | Ultra Clean Processing of Semiconductor Surfaces XV | Solid State Phenomena Vol. 314 | Ultra Clean Processing of Semiconductor Surfaces XV | Book | Scientific.Net |
| 2023 | VIII | Brugge | Ultra Clean Processing of Semiconductor Surfaces XVI |