The UCPSS symposium wants to be the platform for all people active in the field of Ultra Clean Processing of Semiconductor Surfaces to describe new results, to encourage engaged in-depth cross-functional discussions between the experts and to be a valuable learning experience for those who are new to the field or those enthusiasts who want to broaden their horizon in general.
As we target as wide as possible an audience active in the academic world, R&D institutes and industry, we want to highlight that the list below is by no means meant to be exhaustive. Use it as a source of inspiration and not as a tool of limitation.


Via this link you can access the submission form for late-news abstracts. Submission deadline for the initial stage abstracts has passed. Late-news abstracts are considered as poster presentation only (not as oral) and, if accepted, will be published in the proceedings book. 


Guidelines for a UCPSS 2-page Extended Abstract:

Keywords: List the keywords covered in your paper – they will be used to facilitate the organisation of the symposium program into different topical sessions.
Use Arial 11pt font. For the rest of the paper, please use Times Roman (Times New Roman, 12pt)

This document explains how to prepare your extended abstract to be submitted to the UCPSS (Ultraclean Processing of Semiconductor Surfaces) conference.
It is required to take this document as a template. All manuscripts must be in English and text must be in black/white only.
Color figures or photographs should also reproduce well in black and white only.
Check your article by printing a hardcopy on a high-quality printer in black/white mode. Please keep this in mind when designing your figures, tables or other artwork etc...
The main purpose of the extended abstract is to allow the program committee to judge if the quality of the work meets the acceptance standard of UCPSS. Abstracts with a commercial content or without data or results will not be accepted.
General typesetting rules
Page Layout.
The text area for your manuscript must be 17 cm wide and 25 cm high (approx. 6.7 inch by 9.8 inch). Do not place any text outside this rectangular frame. Use A4 size (21cm ´ 29.7cm) document setting and page setting. The total abstract length should be at least 2 pages (including figures) and not exceed 4 pages.
Text formatting.
Use a justified 12pt Times New Roman font for the body text. Use italic for emphasizing a word or phrase. Do not use boldface typing or capital letters except for section headings (cf. remarks on section headings, below).
Section Headings. The section headings are in 12pt boldface capital and lowercase letters. Second level headings are typed as part of the succeeding paragraph (like the subsection heading of this paragraph) in a 12pt Times New Roman boldface. There should be no third level headings.
Page Numbers.
Do not add page numbers.
Use SI-units for all physical quantities (e.g. m, kg, s, N, C, A, V, K, J, eV, Pa, bar, …) . Use of other regional or outdated units is not acceptable (e.g. torr, psi, inch, cal, ft, US-gallon, UK-gallon, btu, pk.…) but may optionally be added between brackets, if (still commonly used). E.g. overpressure, pg = 1 bar (=approx. 14 psi).
Equations. Equations should be indented 5 mm (= approx. 0.2 inch), with enough space above and below to separate the equation clearly from the running text. Equations have to be numbered sequentially, with the equation number put in parentheses and flushed to the right .