The previous UCPSS editions were held in Louvain (1992), Bruges (1994), Antwerp (1996), Ostend (1998, 2000 and 2002), Brussels (2004) and Antwerp (2006). The presented papers have been published in the proceedings:

UCPSS 1994: Proceedings of the Second International Symposium on Ultra-Clean Processing of Silicon Surfaces, (Acco, Leuven, 1994, ISBN 90-334-3262-5)

UCPSS 1996: Proceedings of the Third International Symposium on Ultra-Clean Processing of Silicon Surfaces, (Acco, Leuven, 1996, ISBN 90-334-3758-9)

UCPSS 1998: Proceedings of the Fourth International Symposium on Ultra-Clean Processing of Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon, Switzerland, 1999), special edition of Solid State Phenomena Vols. 65-66 (ISBN 3-908450-40-3)
UCPSS 2000: Proceedings of the Fifth International Symposium on Ultra-Clean Processing of Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon, Switzerland, 2002), special edition of Solid State Phenomena Vols. 76-77 (ISBN 3-908450-57-8)

UCPSS 2002: Proceedings of the Sixth International Symposium on Ultra-Clean Processing of Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon, Switzerland, 2003), special edition of Solid State Phenomena Vols. 92-92 (ISBN 3-908450-78-0)

UCPSS 2004: Proceedings of the Seventh International Symposium on Ultra-Clean Processing of Silicon Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon, Switzerland, 2005), special edition of Solid State Phenomena Vols. 103-104 (ISBN 3-908451-06-x)

UCPSS 2006:Proceedings of the Eighth International Symposium on Ultra-Clean Processing of Semiconductor Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon, Switzerland, 2008), special edition of Solid State Phenomena Vols. 134 (ISBN 3-908451-46-9 / 978-3-908451-46-4)

UCPSS 2008:Proceedings of the Ninth International Symposium on Ultra-Clean Processing of Semiconductor Surfaces, (Scitec Publications Ltd, Zuerich-Uetikon, Switzerland, 2009), special edition of Solid State Phenomena Vols. 145-146 (ISBN 3-908451-64-7 / 978-3-908451-64-8)

UCPSS 2008 - Bruges